Analyzing atomic oxygen product evolution in micro cavity plasma arrays by a combination of a multi-PMT OES setup and a 0D chemical model Project: SFB 1316Authors: H. van ImpelD. SteuerV. Schulz-von der GathenMarc BökeJ. GoldaPlasma Chemical Processes .txt 5x txt
Plasma sheath tailoring by a magnetic field for three-dimensional plasma etching Authors: Elia JünglingThomas MussenbrockMarc BökeAchim von KeudellSebastian WilcekPlasma Science Fundamentals 4x txt
