H.-W Becker | Research Data Repository

Low temperature growth of gallium oxide thin films via plasma enhanced atomic layer deposition

Project:

SFB TR 87

Authors:

R. O'Donoghue

J. Reichmann

M. Morteza

D. Rogalla

H.-W Becker

M. Creatore

A. Wieck

A. Devi

Plasma for Materials / Surfaces

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