--Ar on Al2O3-- Data for 1000eV same as in Figure 6 ion energy 500eV electron energy (eV) SE EEDF inside (e-/ion/eV) SE EEDF outside (e-/ion/eV) SE EEDF outside (e-/ion/eV) after Gaussian convolution with width = 8eV -11.13333 0 0 8.01022E-4 -10.46667 0 0 9.20702E-4 -9.8 0 0 0.00105 -9.13333 0 0 0.00119 -8.46667 0 0 0.00134 -7.8 0 0 0.0015 -7.13333 0 0 0.00167 -6.46667 0 0 0.00184 -5.8 0 0 0.00202 -5.13333 0 0 0.0022 -4.46667 0.02898 0 0.00238 -3.8 0.04205 0 0.00255 -3.13333 0.05803 0 0.00273 -2.46667 0.07711 0 0.00289 -1.8 0.09946 0 0.00304 -1.13333 0.12487 0 0.00318 -0.46667 0.13977 0 0.00331 0.2 0.14664 0.00239 0.00342 0.86667 0.14766 0.00931 0.00352 1.53333 0.14345 0.01443 0.00361 2.2 0.13426 0.01766 0.00366 2.86667 0.12018 0.01892 0.00371 3.53333 0.10125 0.01817 0.00376 4.2 0.07742 0.01536 0.00377 4.86667 0.04867 0.01046 0.00379 5.53333 0.01492 0.00342 0.00382 6.2 0 0 0.00382 6.86667 0 0 0.00383 7.53333 0 0 0.00387 8.2 0 0 0.00389 8.86667 0 0 0.00394 9.53333 0 0 0.00402 10.2 0 0 0.00412 10.86667 0 0 0.00425 11.53333 0 0 0.00443 12.2 0 0 0.00465 12.86667 0 0 0.00493 13.53333 0 0 0.00526 14.2 0 0 0.00565 14.86667 0 0 0.0061 15.53333 0 0 0.00661 16.2 0 0 0.00718 16.86667 0 0 0.0078 17.53333 0 0 0.00847 18.2 0 0 0.00919 18.86667 0 0 0.00995 19.53333 0 0 0.01074 20.2 9.20777E-5 3.32043E-5 0.01154 20.86667 0.00175 6.34504E-4 0.01236 21.53333 0.00552 0.00202 0.01317 22.2 0.01148 0.00423 0.01396 22.86667 0.01969 0.00729 0.01472 23.53333 0.0302 0.01125 0.01544 24.2 0.04307 0.01613 0.0161 24.86667 0.05836 0.02198 0.01669 25.53333 0.07613 0.02881 0.01721 26.2 0.09642 0.03667 0.01763 26.86667 0.11931 0.04559 0.01795 27.53333 0.13582 0.05213 0.01817 28.2 0.14171 0.05462 0.01828 28.86667 0.14158 0.05479 0.01828 29.53333 0.13655 0.05305 0.01817 30.2 0.12715 0.04959 0.01794 30.86667 0.11369 0.0445 0.01761 31.53333 0.09634 0.03785 0.01718 32.2 0.07524 0.02966 0.01665 32.86667 0.05046 0.01995 0.01604 33.53333 0.02204 0.00874 0.01535 34.2 0 0 0.0146 34.86667 0 0 0.0138 35.53333 0 0 0.01296 36.2 0 0 0.0121 36.86667 0 0 0.01122 37.53333 0 0 0.01034 38.2 0 0 0.00947 38.86667 0 0 0.00861 39.53333 0 0 0.00779 40.2 0 0 0.00699 40.86667 0 0 0.00624 41.53333 0 0 0.00554 42.2 0 0 0.00488 42.86667 0 0 0.00427 43.53333 0 0 0.00372 44.2 0 0 0.00321 44.86667 0 0 0.00276 45.53333 0 0 0.00236 46.2 0 0 0.002 46.86667 0 0 0.00168 47.53333 0 0 0.0014 48.2 0 0 0.00116 48.86667 0 0 9.52121E-4 49.53333 0 0 7.72068E-4 50.2 0 0 6.1746E-4 50.86667 0 0 4.85005E-4 51.53333 0 0 3.72883E-4 52.2 0 0 2.79843E-4 52.86666 0 0 2.24081E-4 53.53334 0 0 1.4301E-4 54.2 0 0 9.52837E-5 54.86666 0 0 7.53717E-5 55.53334 0 0 3.2545E-5 56.2 0 0 1.46449E-5 56.86666 0 0 1.14737E-5 57.53334 0 0 0 58.2 0 0 0 58.86666 0 0 0 59.53334 0 0 0 60.2 0 0 0 60.86666 0 0 0 61.53334 0 0 0 62.2 0 0 0 62.86666 0 0 0 63.53334 0 0 0 64.2 0 0 0 64.86666 0 0 0 65.53334 0 0 0 66.2 0 0 0 66.86666 0 0 0 67.53334 0 0 0 68.2 0 0 0 68.86666 0 0 0 69.53334 0 0 0 70.2 0 0 0 70.86666 0 0 0 71.53334 0 0 0 72.2 0 0 0 72.86666 0 0 0 73.53334 0 0 0 74.2 0 0 0 74.86666 0 0 0 75.53334 0 0 0 76.2 0 0 0 76.86666 0 0 0 77.53334 0 0 0 78.2 0 0 0 78.86666 0 0 0 79.53334 0 0 0 80.2 0 0 0 80.86666 0 0 0 81.53334 0 0 0 82.2 0 0 0 82.86666 0 0 0 83.53334 0 0 0 84.2 0 0 0 84.86666 0 0 0 85.53334 0 0 0 86.2 0 0 0 86.86666 0 0 0 87.53334 0 0 0 88.2 0 0 0 88.86666 0 0 0 89.53334 0 0 0 90.2 0 0 0 90.86666 0 0 0 91.53334 0 0 0 92.2 0 0 0 92.86666 0 0 0 93.53334 0 0 0 94.2 0 0 0 94.86666 0 0 0 95.53334 0 0 0 96.2 0 0 0 96.86666 0 0 0 97.53334 0 0 0 98.2 0 0 0 98.86666 0 0 0 99.53334 0 0 0 100.2 0 0 0 100.86666 0 0 0 101.53334 0 0 0 102.2 0 0 0 102.86666 0 0 0 103.53334 0 0 0 104.2 0 0 0 104.86666 0 0 0 105.53334 0 0 0 106.2 0 0 0 106.86666 0 0 0 107.53334 0 0 0 108.2 0 0 0 108.86666 0 0 0 109.53334 0 0 0 110.2 0 0 0 110.86666 0 0 0 111.53334 0 0 0 112.2 0 0 0 112.86666 0 0 0 113.53334 0 0 0 114.2 0 0 0 114.86666 0 0 0 115.53334 0 0 0 116.2 0 0 0 116.86667 0 0 0 117.53333 0 0 0 118.2 0 0 0 118.86667 0 0 0 119.53333 0 0 0 120.2 0 0 0 120.86667 0 0 0 121.53333 0 0 0 122.2 0 0 0 122.86667 0 0 0 123.53333 0 0 0 124.2 0 0 0 124.86667 0 0 0 125.53333 0 0 0 126.2 0 0 0 126.86667 0 0 0 127.53333 0 0 0 128.2 0 0 0 128.86667 0 0 0 129.53333 0 0 0 130.2 0 0 0 130.86667 0 0 0 131.53333 0 0 0 132.2 0 0 0 132.86667 0 0 0 133.53333 0 0 0 134.2 0 0 0 134.86667 0 0 0 135.53333 0 0 0 136.2 0 0 0 136.86667 0 0 0 137.53333 0 0 0 138.2 0 0 0 138.86667 0 0 0 139.53333 0 0 0 140.2 0 0 0 140.86667 0 0 0 141.53333 0 0 0 142.2 0 0 0 142.86667 0 0 0 143.53333 0 0 0 144.2 0 0 0 144.86667 0 0 0 145.53333 0 0 0 146.2 0 0 0 146.86667 0 0 0 147.53333 0 0 0 148.2 0 0 0 148.86667 0 0 0 149.53333 0 0 0 150.2 0 0 0 150.86667 0 0 0 151.53333 0 0 0 152.2 0 0 0 152.86667 0 0 0 153.53333 0 0 0 154.2 0 0 0 154.86667 0 0 0 155.53333 0 0 0 156.2 0 0 0 156.86667 0 0 0 157.53333 0 0 0 158.2 0 0 0 158.86667 0 0 0 159.53333 0 0 0 160.2 0 0 0 160.86667 0 0 0 161.53333 0 0 0 162.2 0 0 0 162.86667 0 0 0 163.53333 0 0 0 164.2 0 0 0 164.86667 0 0 0 165.53333 0 0 0 166.2 0 0 0 166.86667 0 0 0 167.53333 0 0 0 168.2 0 0 0 168.86667 0 0 0 169.53333 0 0 0 170.2 0 0 0 170.86667 0 0 0 171.53333 0 0 0 172.2 0 0 0 172.86667 0 0 0 173.53333 0 0 0 174.2 0 0 0 174.86667 0 0 0 175.53333 0 0 0 176.2 0 0 0 176.86667 0 0 0 177.53333 0 0 0 178.2 0 0 0 178.86667 0 0 0 179.53333 0 0 0 180.2 0 0 0 180.86667 0 0 0 181.53333 0 0 0 182.2 0 0 0 182.86667 0 0 0 183.53333 0 0 0 184.2 0 0 0 184.86667 0 0 0 185.53333 0 0 0 186.2 0 0 0 186.86667 0 0 0 187.53333 0 0 0 188.2 0 0 0 ion energy 800eV electron energy (eV) SE EEDF inside (e-/ion/eV) SE EEDF outside (e-/ion/eV) SE EEDF outside (e-/ion/eV) after Gaussian convolution with width = 8eV -11.13333 0 0 8.01022E-4 -10.46667 0 0 9.20702E-4 -9.8 0 0 0.00105 -9.13333 0 0 0.00119 -8.46667 0 0 0.00134 -7.8 0 0 0.0015 -7.13333 0 0 0.00167 -6.46667 0 0 0.00184 -5.8 0 0 0.00202 -5.13333 0 0 0.0022 -4.46667 0.02898 0 0.00238 -3.8 0.04205 0 0.00255 -3.13333 0.05803 0 0.00273 -2.46667 0.07711 0 0.00289 -1.8 0.09946 0 0.00304 -1.13333 0.12487 0 0.00318 -0.46667 0.13977 0 0.0033 0.2 0.14664 0.00239 0.00341 0.86667 0.14766 0.00931 0.00349 1.53333 0.14345 0.01443 0.00355 2.2 0.13426 0.01766 0.00359 2.86667 0.12018 0.01892 0.0036 3.53333 0.10125 0.01817 0.00359 4.2 0.07742 0.01536 0.00356 4.86667 0.04867 0.01046 0.0035 5.53333 0.01492 0.00342 0.00342 6.2 0 0 0.00332 6.86667 0 0 0.0032 7.53333 0 0 0.00307 8.2 0 0 0.00292 8.86667 0 0 0.00276 9.53333 0 0 0.00259 10.2 0 0 0.00241 10.86667 0 0 0.00224 11.53333 0 0 0.00207 12.2 0 0 0.0019 12.86667 0 0 0.00174 13.53333 0 0 0.00161 14.2 0 0 0.00147 14.86667 0 0 0.00135 15.53333 0 0 0.00128 16.2 0 0 0.00119 16.86667 0 0 0.00115 17.53333 0 0 0.00114 18.2 0 0 0.00114 18.86667 0 0 0.00117 19.53333 0 0 0.00125 20.2 0 0 0.00134 20.86667 0 0 0.00147 21.53333 0 0 0.00164 22.2 0 0 0.00184 22.86667 0 0 0.00209 23.53333 0 0 0.00237 24.2 0 0 0.00269 24.86667 0 0 0.00306 25.53333 0 0 0.00347 26.2 0 0 0.00391 26.86667 0 0 0.0044 27.53333 0 0 0.00494 28.2 0 0 0.00551 28.86667 0 0 0.00614 29.53333 0 0 0.00678 30.2 0 0 0.00747 30.86667 0 0 0.00821 31.53333 4.71989E-4 1.8541E-4 0.00892 32.2 0.00241 9.4904E-4 0.00967 32.86667 0.00587 0.00232 0.01046 33.53333 0.01089 0.00432 0.01121 34.2 0.01751 0.00697 0.01197 34.86667 0.02575 0.01027 0.01274 35.53333 0.03564 0.01426 0.01347 36.2 0.04722 0.01895 0.0142 36.86667 0.06052 0.02436 0.0149 37.53333 0.07557 0.03049 0.01558 38.2 0.09098 0.0368 0.01623 38.86667 0.09776 0.03964 0.01686 39.53333 0.09945 0.04042 0.01747 40.2 0.09741 0.03968 0.01806 40.86667 0.09219 0.03764 0.01863 41.53333 0.08407 0.0344 0.01919 42.2 0.07323 0.03003 0.01973 42.86667 0.05979 0.02456 0.02027 43.53333 0.04381 0.01804 0.02081 44.2 0.02536 0.01046 0.02134 44.86667 0.00447 0.00185 0.02187 45.53333 0 0 0.02239 46.2 0 0 0.02292 46.86667 0 0 0.02344 47.53333 8.27061E-4 3.44257E-4 0.02395 48.2 0.00421 0.00176 0.02444 48.86667 0.01024 0.00428 0.02492 49.53333 0.01897 0.00794 0.02536 50.2 0.03044 0.01275 0.02576 50.86667 0.04468 0.01875 0.02611 51.53333 0.06174 0.02594 0.02639 52.2 0.08166 0.03436 0.0266 52.86666 0.10448 0.04403 0.02674 53.53334 0.13024 0.05496 0.02677 54.2 0.15653 0.06615 0.02671 54.86666 0.16792 0.07106 0.02654 55.53334 0.17056 0.07227 0.02626 56.2 0.16681 0.07077 0.02586 56.86666 0.15763 0.06696 0.02535 57.53334 0.14354 0.06105 0.02472 58.2 0.12486 0.05317 0.02399 58.86666 0.10179 0.0434 0.02316 59.53334 0.0745 0.0318 0.02223 60.2 0.04307 0.0184 0.02122 60.86666 0.00758 0.00324 0.02015 61.53334 0 0 0.01901 62.2 0 0 0.01783 62.86666 0 0 0.01664 63.53334 0 0 0.01542 64.2 0 0 0.01421 64.86666 0 0 0.01303 65.53334 0 0 0.01185 66.2 0 0 0.01072 66.86666 0 0 0.00965 67.53334 0 0 0.00862 68.2 0 0 0.00766 68.86666 0 0 0.00677 69.53334 0 0 0.00595 70.2 0 0 0.00519 70.86666 0 0 0.0045 71.53334 0 0 0.00387 72.2 0 0 0.00331 72.86666 0 0 0.00282 73.53334 0 0 0.00238 74.2 0 0 0.00199 74.86666 0 0 0.00166 75.53334 0 0 0.00136 76.2 0 0 0.00111 76.86666 0 0 8.93411E-4 77.53334 0 0 7.07576E-4 78.2 0 0 5.48955E-4 78.86666 0 0 4.16388E-4 79.53334 0 0 3.07481E-4 80.2 0 0 2.19552E-4 80.86666 0 0 1.49985E-4 81.53334 0 0 9.63582E-5 82.2 0 0 5.64918E-5 82.86666 0 0 2.84662E-5 83.53334 0 0 1.06185E-5 84.2 0 0 1.52866E-6 84.86666 0 0 0 85.53334 0 0 0 86.2 0 0 0 86.86666 0 0 0 87.53334 0 0 0 88.2 0 0 0 88.86666 0 0 0 89.53334 0 0 0 90.2 0 0 0 90.86666 0 0 0 91.53334 0 0 0 92.2 0 0 0 92.86666 0 0 0 93.53334 0 0 0 94.2 0 0 0 94.86666 0 0 0 95.53334 0 0 0 96.2 0 0 0 96.86666 0 0 0 97.53334 0 0 0 98.2 0 0 0 98.86666 0 0 0 99.53334 0 0 0 100.2 0 0 0 100.86666 0 0 0 101.53334 0 0 0 102.2 0 0 0 102.86666 0 0 0 103.53334 0 0 0 104.2 0 0 0 104.86666 0 0 0 105.53334 0 0 0 106.2 0 0 0 106.86666 0 0 0 107.53334 0 0 0 108.2 0 0 0 108.86666 0 0 0 109.53334 0 0 0 110.2 0 0 0 110.86666 0 0 0 111.53334 0 0 0 112.2 0 0 0 112.86666 0 0 0 113.53334 0 0 0 114.2 0 0 0 114.86666 0 0 0 115.53334 0 0 0 116.2 0 0 0 116.86667 0 0 0 117.53333 0 0 0 118.2 0 0 0 118.86667 0 0 0 119.53333 0 0 0 120.2 0 0 0 120.86667 0 0 0 121.53333 0 0 0 122.2 0 0 0 122.86667 0 0 0 123.53333 0 0 0 124.2 0 0 0 124.86667 0 0 0 125.53333 0 0 0 126.2 0 0 0 126.86667 0 0 0 127.53333 0 0 0 128.2 0 0 0 128.86667 0 0 0 129.53333 0 0 0 130.2 0 0 0 130.86667 0 0 0 131.53333 0 0 0 132.2 0 0 0 132.86667 0 0 0 133.53333 0 0 0 134.2 0 0 0 134.86667 0 0 0 135.53333 0 0 0 136.2 0 0 0 136.86667 0 0 0 137.53333 0 0 0 138.2 0 0 0 138.86667 0 0 0 139.53333 0 0 0 140.2 0 0 0 140.86667 0 0 0 141.53333 0 0 0 142.2 0 0 0 142.86667 0 0 0 143.53333 0 0 0 144.2 0 0 0 144.86667 0 0 0 145.53333 0 0 0 146.2 0 0 0 146.86667 0 0 0 147.53333 0 0 0 148.2 0 0 0 148.86667 0 0 0 149.53333 0 0 0 150.2 0 0 0 150.86667 0 0 0 151.53333 0 0 0 152.2 0 0 0 152.86667 0 0 0 153.53333 0 0 0 154.2 0 0 0 154.86667 0 0 0 155.53333 0 0 0 156.2 0 0 0 156.86667 0 0 0 157.53333 0 0 0 158.2 0 0 0 158.86667 0 0 0 159.53333 0 0 0 160.2 0 0 0 160.86667 0 0 0 161.53333 0 0 0 162.2 0 0 0 162.86667 0 0 0 163.53333 0 0 0 164.2 0 0 0 164.86667 0 0 0 165.53333 0 0 0 166.2 0 0 0 166.86667 0 0 0 167.53333 0 0 0 168.2 0 0 0 168.86667 0 0 0 169.53333 0 0 0 170.2 0 0 0 170.86667 0 0 0 171.53333 0 0 0 172.2 0 0 0 172.86667 0 0 0 173.53333 0 0 0 174.2 0 0 0 174.86667 0 0 0 175.53333 0 0 0 176.2 0 0 0 176.86667 0 0 0 177.53333 0 0 0 178.2 0 0 0 178.86667 0 0 0 179.53333 0 0 0 180.2 0 0 0 180.86667 0 0 0 181.53333 0 0 0 182.2 0 0 0 182.86667 0 0 0 183.53333 0 0 0 184.2 0 0 0 184.86667 0 0 0 185.53333 0 0 0 186.2 0 0 0 186.86667 0 0 0 187.53333 0 0 0 188.2 0 0 0