SE EEDF MEASUREMENTS
--Ar on Cu2O--
	
ion energy (eV)	2000eV
electron energy (eV)	SE EEDF(e-/ion/eV)
100	0
90	0
80	0
70	0
60	9.80392E-4
50	9.80392E-4
40	0
30	9.80392E-4
20	-9.80392E-4
10	0.0098
0	0.01765
-10	0.00686
-20	9.80392E-4
-30	0
-40	0
-50	0
-60	0
-70	0
-80	0
-90	0
-100	0

ion energy (eV)	4000eV
electron energy (eV)	SE EEDF(e-/ion/eV)
100	0	0
90	0	2.76243E-4
80	0	2.76243E-4
70	0	5.52486E-4
60	9.80392E-4	5.52486E-4
50	9.80392E-4	-2.76243E-4
40	0	0
30	9.80392E-4	8.28729E-4
20	-9.80392E-4	0.00221
10	0.0098	0.02044
0	0.01765	0.02348
-10	0.00686	0.00552
-20	9.80392E-4	8.28729E-4
-30	0	0
-40	0	0
-50	0	0
-60	0	2.76243E-4
-70	0	2.76243E-4
-80	0	0
-90	0	-2.76243E-4
-100	0	-5.52486E-4
------------------------------------------
SE EEDF MODELING
Extended Hagstrum model
-- Ar on Cu2O--

same model for both ion energies, 2000eV and 4000eV due to models assumptions. 
P_t,63=0.01
electron energy (eV)	escape probability	SE EEDF inside (e-/ion/eV)	SE EEDF outside (e-/ion/eV)	SE EEDF outside (e-/ion/eV) after Gaussian convolution with width = 8eV
-11.13333	0	0	0	1.20378E-4
-10.46667	0	0	0	1.75963E-4
-9.8	0	0	0	2.45593E-4
-9.13333	0	0	0	3.33297E-4
-8.46667	0	0	0	4.44732E-4
-7.8	0	0	0	5.83476E-4
-7.13333	0	0	0	7.52677E-4
-6.46667	0	0	0	9.54683E-4
-5.8	0	0	0	0.00119
-5.13333	0	0	0	0.00146
-4.46667	0.04077	0	0	0.00176
-3.8	0.0567	0	0	0.00209
-3.13333	0.0758	0	0	0.00243
-2.46667	0.09826	0	0	0.00279
-1.8	0.12425	0	0	0.00314
-1.13333	0.14094	0	0	0.00349
-0.46667	0.14882	0	0	0.0038
0.2	0.15062	0.01633	0.00246	0.00407
0.86667	0.14703	0.06305	0.00927	0.00429
1.53333	0.13831	0.10062	0.01392	0.00444
2.2	0.12456	0.13153	0.01638	0.00453
2.86667	0.10579	0.15741	0.01665	0.00454
3.53333	0.08198	0.17943	0.01471	0.00447
4.2	0.05307	0.19839	0.01053	0.00433
4.86667	0.019	0.21491	0.00408	0.00413
5.53333	0	0.22943	0	0.00387
6.2	0	0.24231	0	0.00356
6.86667	0	0.25381	0	0.00322
7.53333	0	0.26415	0	0.00287
8.2	0	0.27351	0	0.00252
8.86667	0	0.28201	0	0.00217
9.53333	0	0.28977	0	0.00183
10.2	0	0.29689	0	0.00153
10.86667	0	0.30345	0	0.00125
11.53333	0	0.30951	0	0.00101
12.2	0	0.31513	0	7.96293E-4
12.86667	0	0.32036	0	6.1968E-4
13.53333	0	0.32523	0	4.74155E-4
14.2	0	0.32979	0	3.56722E-4
14.86667	0	0.33406	0	2.63869E-4
15.53333	0	0.33808	0	1.90724E-4
16.2	0	0.34186	0	1.31983E-4
16.86667	0	0.34542	0	8.63306E-5
17.53333	0	0.34879	0	5.21613E-5
18.2	0	0.35198	0	2.78405E-5
18.86667	0	0.35501	0	1.18623E-5
19.53333	0	0.35788	0	2.93305E-6
20.2	0	0.36061	0	0
20.86667	0	0.36321	0	0
21.53333	0	0.3657	0	0
22.2	0	0.36807	0	0
22.86667	0	0.37033	0	0
23.53333	0	0.3725	0	0
24.2	0	0.37458	0	0
24.86667	0	0.37658	0	0
25.53333	0	0.37849	0	0
26.2	0	0.38033	0	0
26.86667	0	0.3821	0	0
27.53333	0	0.3838	0	0
28.2	0	0.38544	0	0
28.86667	0	0.38702	0	0
29.53333	0	0.38855	0	0
30.2	0	0.39002	0	0
30.86667	0	0.39145	0	0
31.53333	0	0.39283	0	0
32.2	0	0.39416	0	0
32.86667	0	0.39545	0	0
33.53333	0	0.3967	0	0
34.2	0	0.39791	0	0
34.86667	0	0.39909	0	0
35.53333	0	0.40023	0	0
36.2	0	0.40133	0	0
36.86667	0	0.40241	0	0
37.53333	0	0.40345	0	0
38.2	0	0.40447	0	0
38.86667	0	0.40546	0	0
39.53333	0	0.40642	0	0
40.2	0	0.40735	0	0
40.86667	0	0.40827	0	0
41.53333	0	0.40916	0	2.95641E-10
42.2	0	0.41002	0	6.01885E-9
42.86667	0	0.41087	0	2.64E-8
43.53333	0	0.41169	0	7.48758E-8
44.2	0	0.41249	0	1.70617E-7
44.86667	0	0.41328	0	3.40455E-7
45.53333	0	0.41405	0	6.21251E-7
46.2	0	0.41479	0	1.06273E-6
46.86667	0	0.41553	0	1.73078E-6
47.53333	0	0.41624	0	2.71117E-6
48.2	0	0.41694	0	4.11357E-6
48.86667	0	0.41762	0	6.04799E-6
49.53333	0	0.41829	0	8.63083E-6
50.2	0	0.41895	0	1.20052E-5
50.86667	0	0.41959	0	1.63314E-5
51.53333	0	0.42022	0	2.1781E-5
52.2	0	0.42083	0	2.85287E-5
52.86666	0	0.42143	0	3.67418E-5
53.53334	0	0.42202	0	4.65668E-5
54.2	0	0.4226	0	5.81131E-5
54.86666	0	0.42317	0	7.14356E-5
55.53334	0	0.42372	0	8.65453E-5
56.2	9.69996E-7	0.42427	4.11538E-7	1.03421E-4
56.86666	1.83031E-5	0.4248	7.77521E-6	1.21905E-4
57.53334	5.75698E-5	0.42533	2.4486E-5	1.4174E-4
58.2	1.19081E-4	0.42584	5.07099E-5	1.62567E-4
58.86666	2.03147E-4	0.42635	8.66112E-5	1.83926E-4
59.53334	3.10073E-4	0.42684	1.32353E-4	2.05271E-4
60.2	4.40163E-4	0.42733	1.88096E-4	2.25988E-4
60.86666	5.93715E-4	0.42781	2.53998E-4	2.45422E-4
61.53334	7.71033E-4	0.42828	3.30219E-4	2.62908E-4
62.2	9.72406E-4	0.42874	4.16913E-4	2.7781E-4
62.86666	0.0012	0.4292	5.14234E-4	2.89557E-4
63.53334	0.00136	0.42964	5.83602E-4	2.97679E-4
64.2	0.00141	0.43008	6.07107E-4	3.01838E-4
64.86666	0.0014	0.43052	6.04788E-4	3.01849E-4
65.53334	0.00135	0.43094	5.81651E-4	2.97697E-4
66.2	0.00125	0.43136	5.40134E-4	2.89537E-4
66.86666	0.00112	0.43177	4.81661E-4	2.77685E-4
67.53334	9.42064E-4	0.43217	4.07134E-4	2.62598E-4
68.2	7.33214E-4	0.43257	3.17166E-4	2.44844E-4
68.86666	4.90058E-4	0.43296	2.12176E-4	2.25069E-4
69.53334	2.13351E-4	0.43335	9.24552E-5	2.03955E-4
70.2	0	0.43373	0	1.82187E-4
70.86666	0	0.4341	0	1.60406E-4
71.53334	0	0.43447	0	1.39191E-4
72.2	0	0.43483	0	1.19026E-4
72.86666	0	0.43519	0	1.00287E-4
73.53334	0	0.43554	0	8.32448E-5
74.2	0	0.43589	0	6.80593E-5
74.86666	0	0.43623	0	5.4792E-5
75.53334	0	0.43656	0	4.34184E-5
76.2	0	0.4369	0	3.38459E-5
76.86666	0	0.43722	0	2.59308E-5
77.53334	0	0.43755	0	1.94966E-5
78.2	0	0.43786	0	1.43503E-5
78.86666	0	0.43818	0	1.03143E-5
79.53334	0	0.43849	0	7.22097E-6
80.2	0	0.43879	0	4.90079E-6
80.86666	0	0.43909	0	3.20007E-6
81.53334	0	0.43939	0	1.98565E-6
82.2	0	0.43968	0	1.14621E-6
82.86666	0	0.43997	0	5.91369E-7
83.53334	0	0.44026	0	2.49761E-7
84.2	0	0.44054	0	6.64182E-8
84.86666	0	0.44082	0	0
85.53334	0	0.44109	0	0
86.2	0	0.44137	0	0
86.86666	0	0.44163	0	0
87.53334	0	0.4419	0	0
88.2	0	0.44216	0	0
88.86666	0	0.44242	0	0
89.53334	0	0.44267	0	0
90.2	0	0.44292	0	0
90.86666	0	0.44317	0	0
91.53334	0	0.44342	0	0
92.2	0	0.44366	0	0
92.86666	0	0.4439	0	0
93.53334	0	0.44414	0	0
94.2	0	0.44437	0	0
94.86666	0	0.44461	0	0
95.53334	0	0.44484	0	0
96.2	0	0.44506	0	0
96.86666	0	0.44529	0	0
97.53334	0	0.44551	0	0
98.2	0	0.44573	0	0
98.86666	0	0.44594	0	0
99.53334	0	0.44616	0	0
100.2	0	0.44637	0	0
100.86666	0	0.44658	0	0
101.53334	0	0.44679	0	0
102.2	0	0.44699	0	0
102.86666	0	0.4472	0	0
103.53334	0	0.4474	0	0
104.2	0	0.4476	0	0
104.86666	0	0.44779	0	0
105.53334	0	0.44799	0	0
106.2	0	0.44818	0	0
106.86666	0	0.44837	0	0
107.53334	0	0.44856	0	0
108.2	0	0.44875	0	0
108.86666	0	0.44893	0	0
109.53334	0	0.44912	0	0
110.2	0	0.4493	0	0
110.86666	0	0.44948	0	0
111.53334	0	0.44966	0	0
112.2	0	0.44983	0	0
112.86666	0	0.45001	0	0
113.53334	0	0.45018	0	0
114.2	0	0.45035	0	0
114.86666	0	0.45052	0	0
115.53334	0	0.45069	0	0
116.2	0	0.45086	0	0
116.86667	0	0.45102	0	0
117.53333	0	0.45118	0	0
118.2	0	0.45135	0	0
118.86667	0	0.45151	0	0
119.53333	0	0.45167	0	0
120.2	0	0.45182	0	0
120.86667	0	0.45198	0	0
121.53333	0	0.45213	0	0
122.2	0	0.45229	0	0
122.86667	0	0.45244	0	0
123.53333	0	0.45259	0	0
124.2	0	0.45274	0	0
124.86667	0	0.45289	0	0
125.53333	0	0.45303	0	0
126.2	0	0.45318	0	0
126.86667	0	0.45332	0	0
127.53333	0	0.45347	0	0
128.2	0	0.45361	0	0
128.86667	0	0.45375	0	0
129.53333	0	0.45389	0	0
130.2	0	0.45403	0	0
130.86667	0	0.45416	0	0
131.53333	0	0.4543	0	0
132.2	0	0.45444	0	0
132.86667	0	0.45457	0	0
133.53333	0	0.4547	0	0
134.2	0	0.45483	0	0
134.86667	0	0.45496	0	0
135.53333	0	0.45509	0	0
136.2	0	0.45522	0	0
136.86667	0	0.45535	0	0
137.53333	0	0.45548	0	0
138.2	0	0.4556	0	0
138.86667	0	0.45573	0	0
139.53333	0	0.45585	0	0
140.2	0	0.45597	0	0
140.86667	0	0.45609	0	0
141.53333	0	0.45621	0	0
142.2	0	0.45633	0	0
142.86667	0	0.45645	0	0
143.53333	0	0.45657	0	0
144.2	0	0.45669	0	0
144.86667	0	0.4568	0	0
145.53333	0	0.45692	0	0
146.2	0	0.45703	0	0
146.86667	0	0.45715	0	0
147.53333	0	0.45726	0	0
148.2	0	0.45737	0	0
148.86667	0	0.45748	0	0
149.53333	0	0.45759	0	0
150.2	0	0.4577	0	0
150.86667	0	0.45781	0	0
151.53333	0	0.45792	0	0
152.2	0	0.45803	0	0
152.86667	0	0.45813	0	0
153.53333	0	0.45824	0	0
154.2	0	0.45834	0	0
154.86667	0	0.45845	0	0
155.53333	0	0.45855	0	0
156.2	0	0.45865	0	0
156.86667	0	0.45876	0	0
157.53333	0	0.45886	0	0
158.2	0	0.45896	0	0
158.86667	0	0.45906	0	0
159.53333	0	0.45916	0	0
160.2	0	0.45926	0	0
160.86667	0	0.45935	0	0
161.53333	0	0.45945	0	0
162.2	0	0.45955	0	0
162.86667	0	0.45964	0	0
163.53333	0	0.45974	0	0
164.2	0	0.45983	0	0
164.86667	0	0.45993	0	0
165.53333	0	0.46002	0	0
166.2	0	0.46011	0	0
166.86667	0	0.46021	0	0
167.53333	0	0.4603	0	0
168.2	0	0.46039	0	0
168.86667	0	0.46048	0	0
169.53333	0	0.46057	0	0
170.2	0	0.46066	0	0
170.86667	0	0.46075	0	0
171.53333	0	0.46084	0	0
172.2	0	0.46092	0	0
172.86667	0	0.46101	0	0
173.53333	0	0.4611	0	0
174.2	0	0.46118	0	0
174.86667	0	0.46127	0	0
175.53333	0	0.46135	0	0
176.2	0	0.46144	0	0
176.86667	0	0.46152	0	0
177.53333	0	0.46161	0	0
178.2	0	0.46169	0	0
178.86667	0	0.46177	0	0
179.53333	0	0.46185	0	0
180.2	0	0.46193	0	0
180.86667	0	0.46201	0	0
181.53333	0	0.4621	0	0
182.2	0	0.46218	0	0
182.86667	0	0.46225	0	0
183.53333	0	0.46233	0	0
184.2	0	0.46241	0	0
184.86667	0	0.46249	0	0
185.53333	0	0.46257	0	0
186.2	0	0.46265	0	0
186.86667	0	0.46272	0	0
187.53333	0	0.4628	0	0
188.2	0	0.46287	0	0