SE EEDF MEASUREMENTS --Ar on metallic Ti-- ion energy (eV) 500eV electron energy (eV) SE EEDF(e-/ion/eV) -50 0 -40 0 -30 0 -20 -9.96678E-5 -10 2.99003E-4 0 9.63455E-4 10 0.00136 15 5.98007E-4 20 -1.99336E-4 25 -1.99336E-4 30 5.98007E-4 35 0.00193 40 0.00193 45 5.98007E-4 50 -1.99336E-4 55 0 60 0 65 0 70 0 75 0 80 0 ion energy (eV) 800eV electron energy (eV) SE EEDF(e-/ion/eV) -50 3.55271E-17 -40 1.77636E-17 -30 -5.35714E-5 -20 -5.35714E-5 -10 0.00116 0 0.00259 10 0.00304 15 0.00118 20 -4.28571E-4 25 0 30 -1.07143E-4 35 3.21429E-4 40 0.00104 45 8.21429E-4 50 8.57143E-4 55 0.00229 60 0.003 65 0.002 70 0.00114 75 7.14286E-4 80 9.64286E-4 85 0.00196 90 0.00207 95 6.42857E-4 100 -2.14286E-4 110 0 120 0 130 0 140 -1.77636E-17 150 -3.55271E-17 ion energy (eV) 1000eV electron energy (eV) SE EEDF(e-/ion/eV) -50 -2.78644E-17 -40 -2.78644E-17 -30 -8.40336E-5 -20 1.68067E-4 -10 0.001 0 0.00181 10 0.00228 15 0.00155 20 2.10084E-4 25 -1.2605E-4 30 0 35 -1.2605E-4 40 3.78151E-4 45 0.00113 50 0.0013 55 0.00169 60 0.00223 65 0.00196 70 0.00174 75 0.00202 80 0.00263 85 0.00286 90 0.00227 95 7.56303E-4 100 -2.52101E-4 110 0 120 0 130 6.96611E-18 140 6.96611E-18 150 0 ion energy (eV) 2000eV electron energy (eV) SE EEDF(e-/ion/eV) -50 -4.57875E-4 -40 -2.28938E-4 -30 2.28938E-4 -20 7.78388E-4 -10 0.00101 0 0.00128 10 0.00165 20 0.00128 30 8.24176E-4 40 5.49451E-4 50 9.15751E-4 60 0.00275 70 0.00421 80 0.00449 90 0.00375 100 0.00201 110 9.15751E-4 120 5.95238E-4 130 2.28938E-4 140 -2.28938E-4 150 -4.57875E-4 --Ar on TiOx-- ion energy (eV) 500eV electron energy (eV) SE EEDF(e-/ion/eV) -50 3.34373E-17 -40 1.67187E-17 -30 0 -20 -1.0084E-4 -10 2.52101E-4 0 0.00108 10 0.00151 20 0.00158 30 0.00151 40 0.00108 50 2.52101E-4 60 -1.0084E-4 70 -8.35933E-18 80 0 ion energy (eV) 2000eV electron energy (eV) SE EEDF(e-/ion/eV) -50 0 -40 0 -30 -3.42857E-4 -20 0.00103 -10 0.00331 0 0.00331 10 6.85714E-4 15 -6.85714E-4 20 0 25 0 30 0 35 0 40 0 45 -2.05714E-4 50 3.42857E-4 55 0.00281 60 0.00443 65 0.00368 70 0.00274 75 0.00514 80 0.00656 85 0.0069 90 0.00821 95 0.00855 100 0.00759 105 0.00745 110 0.00832 115 0.0056 120 0.00194 125 6.85714E-5 130 -1.37143E-4 140 0 150 0 ------------------------------------ SE EEDF MODELING Extended Hagstrum model -- Ar on TiOx-- ion energy 1000eV Pt,33 = 0.02 and Pt,58 = 0.1. electron energy (eV) escape probability SE EEDF inside (e-/ion/eV) SE EEDF outside (e-/ion/eV) SE EEDF outside (e-/ion/eV) after Gaussian convolution with width = 8eV -12.50333 0 0 0 4.73433E-4 -11.83667 0 0 0 5.52227E-4 -11.17 0 0 0 6.39801E-4 -10.50333 0 0 0 7.36275E-4 -9.83667 0 0 0 8.41594E-4 -9.17 0 0 0 9.55508E-4 -8.50333 0 0 0 0.00108 -7.83667 0 0 0 0.00121 -7.17 0 0 0 0.00134 -6.50333 0 0 0 0.00148 -5.83667 0 0 0 0.00163 -5.17 0 0 0 0.00178 -4.50333 0 0 0 0.00192 -3.83667 0.07649 0 0 0.00207 -3.17 0.09347 0 0 0.00221 -2.50333 0.11133 0 0 0.00235 -1.83667 0.12206 0 0 0.00247 -1.17 0.12837 0 0 0.00259 -0.50333 0.13126 0 0 0.00269 0.16333 0.13106 0.01207 0.00158 0.00278 0.83 0.12793 0.05521 0.00706 0.00285 1.49667 0.12193 0.09056 0.01104 0.00291 2.16333 0.11307 0.12007 0.01358 0.00295 2.83 0.10136 0.14511 0.01471 0.00296 3.49667 0.08677 0.16662 0.01446 0.00296 4.16333 0.06928 0.18532 0.01284 0.00293 4.83 0.04886 0.20173 0.00986 0.00289 5.49667 0.02545 0.21625 0.0055 0.00283 6.16333 0 0.2292 0 0.00275 6.83 0 0.24083 0 0.00266 7.49667 0 0.25134 0 0.00255 8.16333 0 0.26087 0 0.00243 8.83 0 0.26957 0 0.0023 9.49667 0 0.27754 0 0.00216 10.16333 0 0.28487 0 0.00202 10.83 0 0.29164 0 0.00188 11.49667 0 0.29792 0 0.00173 12.16333 0 0.30374 0 0.00159 12.83 0 0.30918 0 0.00144 13.49667 0 0.31425 0 0.00131 14.16333 0 0.31901 0 0.00118 14.83 0 0.32347 0 0.00106 15.49667 0 0.32767 0 9.41055E-4 16.16333 0 0.33163 0 8.35875E-4 16.83 0 0.33537 0 7.39863E-4 17.49667 0 0.33891 0 6.53647E-4 18.16333 0 0.34226 0 5.77109E-4 18.83 0 0.34544 0 5.10129E-4 19.49667 0 0.34847 0 4.52454E-4 20.16333 0 0.35135 0 4.03675E-4 20.83 0 0.3541 0 3.63288E-4 21.49667 0 0.35672 0 3.30714E-4 22.16333 0 0.35923 0 3.05319E-4 22.83 0 0.36162 0 2.86436E-4 23.49667 0 0.36392 0 2.73381E-4 24.16333 2.50566E-10 0.36612 9.17368E-11 2.65461E-4 24.83 1.02204E-5 0.36823 3.76347E-6 2.58938E-4 25.49667 4.10338E-5 0.37026 1.51932E-5 2.5587E-4 26.16333 9.29637E-5 0.37221 3.46021E-5 2.60774E-4 26.83 1.66525E-4 0.37409 6.2295E-5 2.58608E-4 27.49667 2.62224E-4 0.3759 9.85689E-5 2.64343E-4 28.16333 3.80557E-4 0.37764 1.43713E-4 2.77205E-4 28.83 5.22018E-4 0.37932 1.98012E-4 2.83075E-4 29.49667 6.87087E-4 0.38094 2.61741E-4 2.96152E-4 30.16333 8.76239E-4 0.38251 3.3517E-4 3.10333E-4 30.83 0.00109 0.38403 4.18566E-4 3.2395E-4 31.49667 0.00133 0.38549 5.12189E-4 3.37317E-4 32.16333 0.00159 0.38691 6.16292E-4 3.4807E-4 32.83 0.00188 0.38828 7.31126E-4 3.58499E-4 33.49667 0.00211 0.38961 8.22079E-4 3.69235E-4 34.16333 0.00221 0.39091 8.65282E-4 3.76332E-4 34.83 0.00225 0.39216 8.82029E-4 3.84014E-4 35.49667 0.00223 0.39337 8.77514E-4 3.92766E-4 36.16333 0.00216 0.39455 8.54178E-4 3.97563E-4 36.83 0.00206 0.3957 8.13409E-4 4.0389E-4 37.49667 0.00191 0.39681 7.5605E-4 4.11973E-4 38.16333 0.00172 0.3979 6.82647E-4 4.17282E-4 38.83 0.00149 0.39895 5.93549E-4 4.25159E-4 39.49667 0.00122 0.39998 4.88976E-4 4.35671E-4 40.16333 9.20402E-4 0.40098 3.69062E-4 4.45587E-4 40.83 5.81844E-4 0.40195 2.33874E-4 4.59127E-4 41.49667 2.07077E-4 0.4029 8.34318E-5 4.76126E-4 42.16333 0 0.40383 0 4.95311E-4 42.83 0 0.40473 0 5.18855E-4 43.49667 0 0.40561 0 5.46542E-4 44.16333 0 0.40647 0 5.79068E-4 44.83 0 0.40731 0 6.1676E-4 45.49667 0 0.40813 0 6.59847E-4 46.16333 0 0.40893 0 7.08449E-4 46.83 0 0.40971 0 7.62566E-4 47.49667 0 0.41048 0 8.22063E-4 48.16333 0 0.41122 0 8.86665E-4 48.83 0 0.41195 0 9.55954E-4 49.49667 1.34152E-5 0.41267 5.53604E-6 0.00103 50.16333 1.19779E-4 0.41337 4.95129E-5 0.00111 50.83 3.33578E-4 0.41406 1.3812E-4 0.00119 51.49666 6.56458E-4 0.41473 2.72251E-4 0.00127 52.16334 0.00109 0.41538 4.52794E-4 0.00135 52.83 0.00164 0.41603 6.80616E-4 0.00143 53.49666 0.0023 0.41666 9.56584E-4 0.00151 54.16334 0.00307 0.41728 0.00128 0.00158 54.83 0.00396 0.41789 0.00166 0.00166 55.49666 0.00497 0.41848 0.00208 0.00172 56.16334 0.00611 0.41906 0.00256 0.00178 56.83 0.00736 0.41964 0.00309 0.00183 57.49666 0.00874 0.4202 0.00367 0.00187 58.16334 0.01015 0.42075 0.00427 0.00191 58.83 0.01088 0.42129 0.00458 0.00193 59.49666 0.01119 0.42182 0.00472 0.00194 60.16334 0.0112 0.42235 0.00473 0.00194 60.83 0.01096 0.42286 0.00464 0.00193 61.49666 0.0105 0.42336 0.00445 0.00191 62.16334 0.00983 0.42386 0.00417 0.00187 62.83 0.00897 0.42434 0.00381 0.00183 63.49666 0.00792 0.42482 0.00337 0.00178 64.16334 0.00669 0.42529 0.00285 0.00172 64.83 0.00528 0.42576 0.00225 0.00165 65.49666 0.0037 0.42621 0.00158 0.00157 66.16334 0.00195 0.42666 8.32658E-4 0.00149 66.83 3.01064E-5 0.4271 1.28584E-5 0.00141 67.49666 0 0.42753 0 0.00132 68.16334 0 0.42796 0 0.00123 68.83 0 0.42838 0 0.00114 69.49666 0 0.42879 0 0.00105 70.16334 0 0.4292 0 9.57162E-4 70.83 0 0.4296 0 8.70225E-4 71.49666 0 0.42999 0 7.86378E-4 72.16334 0 0.43038 0 7.06282E-4 72.83 0 0.43076 0 6.30476E-4 73.49666 0 0.43114 0 5.59367E-4 74.16334 0 0.43151 0 4.93218E-4 74.83 0 0.43188 0 4.32193E-4 75.49666 0 0.43224 0 3.76338E-4 76.16334 0 0.43259 0 3.2561E-4 76.83 0 0.43294 0 2.79887E-4 77.49666 0 0.43329 0 2.38976E-4 78.16334 0 0.43363 0 2.0263E-4 78.83 0 0.43397 0 1.70561E-4 79.49666 0 0.4343 0 1.42451E-4 80.16334 0 0.43463 0 1.17964E-4 80.83 0 0.43495 0 9.67574E-5 81.49666 0 0.43527 0 7.84892E-5 82.16334 0 0.43558 0 6.2838E-5 82.83 0 0.43589 0 4.96086E-5 83.49666 0 0.4362 0 3.85548E-5 84.16334 0 0.4365 0 2.94211E-5 84.83 0 0.4368 0 2.19631E-5 85.49666 0 0.43709 0 1.59546E-5 86.16334 0 0.43739 0 1.11902E-5 86.83 0 0.43767 0 7.48766E-6 87.49666 0 0.43796 0 4.68648E-6 88.16334 0 0.43824 0 2.6478E-6 88.83 0 0.43851 0 1.25265E-6 89.49666 0 0.43879 0 4.00234E-7 90.16334 0 0.43906 0 6.06168E-9 90.83 0 0.43932 0 0 91.49666 0 0.43959 0 0 92.16334 0 0.43985 0 0 92.83 0 0.44011 0 0 93.49666 0 0.44036 0 0 94.16334 0 0.44061 0 0 94.83 0 0.44086 0 0 95.49666 0 0.44111 0 0 96.16334 0 0.44135 0 0 96.83 0 0.44159 0 0 97.49666 0 0.44183 0 0 98.16334 0 0.44206 0 0 98.83 0 0.4423 0 0 99.49666 0 0.44252 0 0 100.16334 0 0.44275 0 0 100.83 0 0.44298 0 0 101.49666 0 0.4432 0 0 102.16334 0 0.44342 0 0 102.83 0 0.44364 0 0 103.49666 0 0.44385 0 0 104.16334 0 0.44407 0 0 104.83 0 0.44428 0 0 105.49666 0 0.44449 0 0 106.16334 0 0.44469 0 0 106.83 0 0.4449 0 0 107.49666 0 0.4451 0 0 108.16334 0 0.4453 0 0 108.83 0 0.4455 0 0 109.49666 0 0.4457 0 0 110.16334 0 0.44589 0 0 110.83 0 0.44608 0 0 111.49666 0 0.44628 0 0 112.16334 0 0.44646 0 0 112.83 0 0.44665 0 0 113.49666 0 0.44684 0 0 114.16334 0 0.44702 0 0 114.83 0 0.4472 0 0 115.49667 0 0.44738 0 0 116.16333 0 0.44756 0 0 116.83 0 0.44774 0 0 117.49667 0 0.44791 0 0 118.16333 0 0.44809 0 0 118.83 0 0.44826 0 0 119.49667 0 0.44843 0 0 120.16333 0 0.4486 0 0 120.83 0 0.44877 0 0 121.49667 0 0.44893 0 0 122.16333 0 0.4491 0 0 122.83 0 0.44926 0 0 123.49667 0 0.44942 0 0 124.16333 0 0.44958 0 0 124.83 0 0.44974 0 0 125.49667 0 0.4499 0 0 126.16333 0 0.45005 0 0 126.83 0 0.45021 0 0 127.49667 0 0.45036 0 0 128.16333 0 0.45051 0 0 128.83 0 0.45066 0 0 129.49667 0 0.45081 0 0 130.16333 0 0.45096 0 0 130.83 0 0.45111 0 0 131.49667 0 0.45125 0 0 132.16333 0 0.4514 0 0 132.83 0 0.45154 0 0 133.49667 0 0.45168 0 0 134.16333 0 0.45182 0 0 134.83 0 0.45196 0 0 135.49667 0 0.4521 0 0 136.16333 0 0.45224 0 0 136.83 0 0.45238 0 0 137.49667 0 0.45251 0 0 138.16333 0 0.45265 0 0 138.83 0 0.45278 0 0 139.49667 0 0.45291 0 0 140.16333 0 0.45305 0 0 140.83 0 0.45318 0 0 141.49667 0 0.4533 0 0 142.16333 0 0.45343 0 0 142.83 0 0.45356 0 0 143.49667 0 0.45369 0 0 144.16333 0 0.45381 0 0 144.83 0 0.45394 0 0 145.49667 0 0.45406 0 0 146.16333 0 0.45418 0 0 146.83 0 0.4543 0 0 147.49667 0 0.45443 0 0 148.16333 0 0.45455 0 0 148.83 0 0.45466 0 0 149.49667 0 0.45478 0 0 150.16333 0 0.4549 0 0 150.83 0 0.45502 0 0 151.49667 0 0.45513 0 0 152.16333 0 0.45525 0 0 152.83 0 0.45536 0 0 153.49667 0 0.45547 0 0 154.16333 0 0.45559 0 0 154.83 0 0.4557 0 0 155.49667 0 0.45581 0 0 156.16333 0 0.45592 0 0 156.83 0 0.45603 0 0 157.49667 0 0.45614 0 0 158.16333 0 0.45625 0 0 158.83 0 0.45635 0 0 159.49667 0 0.45646 0 0 160.16333 0 0.45656 0 0 160.83 0 0.45667 0 0 161.49667 0 0.45677 0 0 162.16333 0 0.45688 0 0 162.83 0 0.45698 0 0 163.49667 0 0.45708 0 0 164.16333 0 0.45718 0 0 164.83 0 0.45728 0 0 165.49667 0 0.45738 0 0 166.16333 0 0.45748 0 0 166.83 0 0.45758 0 0 167.49667 0 0.45768 0 0 168.16333 0 0.45778 0 0 168.83 0 0.45788 0 0 169.49667 0 0.45797 0 0 170.16333 0 0.45807 0 0 170.83 0 0.45816 0 0 171.49667 0 0.45826 0 0 172.16333 0 0.45835 0 0 172.83 0 0.45844 0 0 173.49667 0 0.45854 0 0 174.16333 0 0.45863 0 0 174.83 0 0.45872 0 0 175.49667 0 0.45881 0 0 176.16333 0 0.4589 0 0 176.83 0 0.45899 0 0 177.49667 0 0.45908 0 0 178.16333 0 0.45917 0 0 178.83 0 0.45926 0 0 179.49667 0 0.45935 0 0 180.16333 0 0.45943 0 0 180.83 0 0.45952 0 0 181.49667 0 0.45961 0 0 182.16333 0 0.45969 0 0 182.83 0 0.45978 0 0 183.49667 0 0.45986 0 0 184.16333 0 0.45995 0 0 184.83 0 0.46003 0 0 185.49667 0 0.46011 0 0 186.16333 0 0.4602 0 0 186.83 0 0.46028 0 0