Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency dischargesThis work utilizes 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations of a symmetric discharge in the low-pressure regime with the inclusion of realistic electron-surface interactions for silicon dioxide.
A diagnostic framework is introduced that segregates the electrons into three groups (bulk-electrons, $\upgamma$-electrons, and $\updelta$-electrons) in order to analyze and discuss their dynamics.
A variation of the electrode gap size is then presented as a control tool to alter the dynamics of the discharge significantly.
It is demonstrated that this control results in two different regimes of low and high plasma density, respectively.
The fundamental electron dynamics of both regimes are explained, which requires a complete analysis starting at global parameters (e.g., densities) down to single electron trajectories.

]]>Plasma Modeling and Simulationd80ea6b8-6e4c-4202-a358-d18b9de2cf732023-07-13T09:11:37+02:002024-04-28T11:26:57+02:00AEPTAveraged electron densities for SM AUsed to generate Figure 1.
1. column: electrode gap size
2. column: bulk electron density

]]>2023-07-13T11:31:07+02:002024-04-25T16:18:10+02:00text/plaintxt508https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-0Averaged electron densities for SM BUsed to generate Figure 1.
1. column: electrode gap size
2. column: bulk electron density
3. column: gamma electron density

]]>2023-07-13T11:40:49+02:002024-04-25T16:18:12+02:00text/plaintxt758https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-1Averaged electron densities for SM CUsed to generate Figure 1.
1. column: electrode gap size
2. column: bulk electron density
3. column: gamma electron density
4. column: delta electron density

]]>2023-07-13T11:44:09+02:002024-04-25T16:18:14+02:00text/plaintxt1008https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-2Averaged electron densities for SM DUsed to generate Figure 1.
1. column: electrode gap size
2. column: bulk electron density
3. column: gamma electron density
4. column: delta electron density

]]>2023-07-13T11:47:35+02:002024-04-25T16:18:18+02:00text/plaintxt816https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-3averaged electron densities for SM EUsed to generate Figure 1.
1. column: electrode gap size
2. column: bulk electron density
3. column: gamma electron density
4. column: delta electron density

]]>2023-07-13T11:52:56+02:002024-04-25T16:19:05+02:00text/plaintxt720https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-4Total RF current density for SM AUsed to generate Figure 2a
1. column: electrode gap size
2. column: first harmonic of the total RF current density at the driven electrode from a Fourier analysis

]]>2023-07-13T12:08:55+02:002024-04-25T16:18:42+02:00text/plaintxt500https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-5Total RF current density for SM BUsed to generate Figure 2a
1. column: electrode gap size
2. column: first harmonic of the total RF current density at the driven electrode from a Fourier analysis

]]>2023-07-13T12:10:25+02:002024-04-25T16:18:44+02:00text/plaintxt500https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-6Total RF current density for SM CUsed to generate Figure 2a
1. column: electrode gap size
2. column: first harmonic of the total RF current density at the driven electrode from a Fourier analysis

]]>2023-07-13T12:11:36+02:002024-04-25T16:18:46+02:00text/plaintxt500https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-7Total RF current density for SM DUsed to generate Figure 2a
1. column: electrode gap size
2. column: first harmonic of the total RF current density at the driven electrode from a Fourier analysis

]]>2023-07-13T12:12:36+02:002024-04-25T16:18:48+02:00text/plaintxt400https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-8Total RF current density for SM EUsed to generate Figure 2a
1. column: electrode gap size
2. column: first harmonic of the total RF current density at the driven electrode from a Fourier analysis

]]>2023-07-13T12:13:01+02:002024-04-25T16:18:50+02:00text/plaintxt350https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-9Electron power densities for SM A
  • column: electrode gap size
  • column: total electron power density
  • column: bulk electron power density

    • Data in columns 1 and 2 are used for Figure 2b.

    ]]>    2023-07-13T14:11:50+02:002024-04-25T16:19:03+02:00text/plaintxt750https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-10    Electron power densities for SM B
  • column: electrode gap size
  • column: total electron power density
  • column: bulk electron power density
  • column: gamma electron power density

    • Data in columns 1 and 2 are used for Figure 2b.
    Data in columns 1, 3, and 4 are used for Figure 5g.

    ]]>    2023-07-13T14:13:24+02:002024-04-25T16:18:55+02:00text/plaintxt1000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-11    Electron power densities for SM C
  • column: electrode gap size
  • column: total electron power density
  • column: bulk electron power density
  • column: gamma electron power density
  • column: delta electron power density

    • Data in columns 1 and 2 are used for Figure 2b.
    Data in columns 1, 3, 4, and 5 are used for Figure 5h.

    ]]>    2023-07-13T14:14:11+02:002024-04-25T16:19:18+02:00text/plaintxt1250https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-12    Electron power densities for SM D
  • column: electrode gap size
  • column: total electron power density
  • column: bulk electron power density
  • column: gamma electron power density
  • column: delta electron power density

    • Data in columns 1 and 2 are used for Figure 2b.

    ]]>    2023-07-13T14:14:57+02:002024-04-25T16:19:16+02:00text/plaintxt1000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-13    Electron power densities for SM E
  • column: electrode gap size
  • column: total electron power density
  • column: bulk electron power density
  • column: gamma electron power density
  • column: delta electron power density

    • Data in columns 1 and 2 are used for Figure 2b.
    Data in columns 1, 3, 4, and 5 are used for Figure 5i.

    ]]>    2023-07-13T14:15:30+02:002024-04-25T16:19:14+02:00text/plaintxt876https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-14    Fraction of each electron group density to the total electron density for SM BData is used to generate Figure 5a
    1. column: fraction of bulk electrons in percent for Lgap=25-70mm
    2. column: fraction of gamma electrons in percent for Lgap=25-70mm

    ]]>    2023-07-13T14:31:37+02:002024-04-25T16:19:13+02:00text/plaintxt500https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-15    Fraction of each electron group density to the total electron density for SM CData is used to generate Figure 5b
    1. column: fraction of bulk electrons in percent for Lgap=25-70mm
    2. column: fraction of gamma electrons in percent for Lgap=25-70mm
    3. column: fraction of delta electrons in percent for Lgap=25-70mm

    ]]>    2023-07-13T14:33:58+02:002024-04-25T16:18:52+02:00text/plaintxt750https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-16    Fraction of each electron group density to the total electron density for SM EData is used to generate Figure 5c
    1. column: fraction of bulk electrons in percent for Lgap=25-55mm
    2. column: fraction of gamma electrons in percent for Lgap=25-55mm
    3. column: fraction of delta electrons in percent for Lgap=25-55mm

    ]]>    2023-07-13T14:34:49+02:002024-04-25T16:19:11+02:00text/plaintxt525https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-17    Contribution of each electron group to the total ionization rate for SM BData is used to generate Figure 5d
    1. column: contribution of bulk electrons in percent for Lgap=25-70mm
    2. column: contribution of gamma electrons in percent for Lgap=25-70mm
    3. column: contribution of delta electrons in percent for Lgap=25-70mm

    ]]>    2023-07-13T14:36:28+02:002024-04-25T16:19:09+02:00text/plaintxt500https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-18    Contribution of each electron group to the total ionization rate for SM CData is used to generate Figure 5e
    1. column: contribution of bulk electrons in percent for Lgap=25-70mm
    2. column: contribution of gamma electrons in percent for Lgap=25-70mm
    3. column: contribution of delta electrons in percent for Lgap=25-70mm

    ]]>    2023-07-13T14:38:20+02:002024-04-25T16:19:07+02:00text/plaintxt750https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-19    Contribution of each electron group to the total ionization rate for SM EData is used to generate Figure 5f
    1. column: contribution of bulk electrons in percent for Lgap=25-55mm
    2. column: contribution of gamma electrons in percent for Lgap=25-55mm
    3. column: contribution of delta electrons in percent for Lgap=25-55mm

    ]]>    2023-07-13T14:39:17+02:002024-04-25T16:19:01+02:00text/plaintxt525https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-20    EEDF of bulk electrons for 55mmData used to generate Figure 6a
    1. column: energy bins
    2. column: EEDF in the center of the discharge (m^-3*eV^-0.5)

    ]]>    2023-07-13T15:02:06+02:002024-04-25T16:18:54+02:00text/plaintxt29998https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-21    EEDF of gamma electrons for 55mmData used to generate Figure 6a
    1. column: energy bins
    2. column: EEDF in the center of the discharge (m^-3*eV^-0.5)

    ]]>    2023-07-13T15:02:45+02:002024-04-25T16:19:35+02:00text/plaintxt29998https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-22    EEDF of delta electrons for 55mmData used to generate Figure 6a
    1. column: energy bins
    2. column: EEDF in the center of the discharge (m^-3*eV^-0.5)

    ]]>    2023-07-13T15:03:04+02:002024-04-25T16:19:33+02:00text/plaintxt29998https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-23    EEDF of bulk electrons for 25mmData used to generate Figure 6b
    1. column: energy bins
    2. column: EEDF in the center of the discharge (m^-3*eV^-0.5)

    ]]>    2023-07-13T15:08:33+02:002024-04-25T16:19:32+02:00text/plaintxt29998https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-24    EEDF of gamma electrons for 25mmData used to generate Figure 6b
    1. column: energy bins
    2. column: EEDF in the center of the discharge (m^-3*eV^-0.5)

    ]]>    2023-07-13T15:11:37+02:002023-10-12T17:31:31+02:00text/plaintxt29998https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-25    EEDF of delta electrons for 25mmData used to generate Figure 6b
    1. column: energy bins
    2. column: EEDF in the center of the discharge (m^-3*eV^-0.5)

    ]]>    2023-07-13T15:12:02+02:002023-10-12T17:31:32+02:00text/plaintxt29998https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-26    Spatio temporal electric field data for 55mmElectric field data in V/m for SM E ($r\,=\,r(\epsilon),\, \gamma\,=\,0.4,\, \delta\,=\,\delta(\epsilon)$)
    Used to calculate the electron power densities in Fig 4d, 7b, 7d and 7f

    ]]>    2023-07-13T15:47:59+02:002024-04-25T16:19:29+02:00text/plaintxt28994419https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-27    Spatio temporal bulk electron flux data for 55mmElectron flux data in A/m^2 for SM E.
    Used to calculate the electron power densities in Fig 4d and 7b.

    ]]>    2023-07-13T16:04:30+02:002023-10-12T17:31:34+02:00text/plaintxt28987883https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-28    Spatio temporal gamma electron flux data for 55mmElectron flux data in A/m^2 for SM E.
    Used to calculate the electron power densities in Fig 4d and 7d.

    ]]>    2023-07-13T16:08:09+02:002024-04-25T16:19:20+02:00text/plaintxt29000376https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-29    Spatio temporal delta electron flux data for 55mmElectron flux data in A/m^2 for SM E.
    Used to calculate the electron power densities in Fig 4d and 7f.

    ]]>    2023-07-13T16:09:03+02:002024-04-25T16:19:28+02:00text/plaintxt28987222https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-30    Spatio temporal fast bulk electron density data for 55mm (down)Spatio temporal distribution of the bulk electron density in m^3 with energies above 15.8 eV moving downwards.
    Used to calculate the electron densities in Fig 3d and 7a.

    ]]>    2023-07-13T16:16:37+02:002024-04-25T16:19:26+02:00text/plaintxt28001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-31    spatio temporal fast bulk electron density data for 55mm (up)Spatio temporal distribution of the bulk electron density in m^3 with energies above 15.8 eV moving upwards.
    Used to calculate the electron densities in Fig 3d and 7a.

    ]]>    2023-07-13T16:18:23+02:002024-04-25T16:19:24+02:00text/plaintxt28001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-32    Spatio temporal fast gamma electron density data for 55mm (down)Spatio temporal distribution of the gamma electron density in m^3 with energies above 15.8 eV moving downwards.
    Used to calculate the electron densities in Fig 3d and 7c.

    ]]>    2023-07-13T16:20:48+02:002024-04-25T16:18:59+02:00text/plaintxt28001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-33    Spatio temporal fast gamma electron density data for 55mm (up)Spatio temporal distribution of the gamma electron density in m^3 with energies above 15.8 eV moving upwards.
    Used to calculate the electron densities in Fig 3d and 7c.

    ]]>    2023-07-13T16:21:47+02:002024-04-25T16:19:22+02:00text/plaintxt28001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-34    Spatio temporal fast delta electron density data for 55mm (down)Spatio temporal distribution of the delta electron density in m^3 with energies above 15.8 eV moving downwards.
    Used to calculate the electron densities in Fig 3d and 7e.

    ]]>    2023-07-13T16:23:37+02:002024-04-25T16:18:16+02:00text/plaintxt28001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-35    Spatio temporal fast delta electron density data for 55mm (up)Spatio temporal distribution of the delta electron density in m^3 with energies above 15.8 eV moving upwards.
    Used to calculate the electron densities in Fig 3d and 7e.

    ]]>    2023-07-13T16:24:36+02:002024-04-25T16:18:57+02:00text/plaintxt28001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-36    Spatio temporal electric field data for 25mmElectric field data in V/m for SM E ($r\,=\,r(\epsilon),\, \gamma\,=\,0.4,\, \delta\,=\,\delta(\epsilon)$)
    Used to calculate the electron power densities in Fig 4b, 9b, 9d and 9f

    ]]>    2023-07-14T08:58:43+02:002023-10-12T17:31:35+02:00text/plaintxt14500917https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-37    Spatio temporal bulk electron flux data for 25mmElectron flux data in A/m^2 for SM E.
    Used to calculate the electron power densities in Fig 4b and 9b.

    ]]>    2023-07-14T09:58:11+02:002023-10-12T17:31:38+02:00text/plaintxt14493564https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-38    Spatio temporal gamma electron flux data for 25mmElectron flux data in A/m^2 for SM E.
    Used to calculate the electron power densities in Fig 4b and 9d.

    ]]>    2023-07-14T09:59:59+02:002023-10-12T17:31:40+02:00text/plaintxt14500925https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-39    Spatio temporal delta electron flux data for 25mmElectron flux data in A/m^2 for SM E.
    Used to calculate the electron power densities in Fig 4b and 9f.

    ]]>    2023-07-14T10:03:39+02:002023-10-12T17:31:42+02:00text/plaintxt14477023https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-40    Spatio temporal fast bulk electron density data for 25mm (down)Spatio temporal distribution of the bulk electron density in m^3 with energies above 15.8 eV moving downwards.
    Used to calculate the electron densities in Fig 3b and 9a.

    ]]>    2023-07-14T10:10:09+02:002023-10-12T17:31:44+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-41    Spatio temporal fast bulk electron density data for 25mm (up)Spatio temporal distribution of the bulk electron density in m^3 with energies above 15.8 eV moving upwards.
    Used to calculate the electron densities in Fig 3b and 9c.

    ]]>    2023-07-14T10:11:52+02:002023-10-12T17:31:18+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-42    Spatio temporal fast gamma electron density data for 25mm (down)Spatio temporal distribution of the gamma electron density in m^3 with energies above 15.8 eV moving downwards.
    Used to calculate the electron densities in Fig 3b and 9c.

    ]]>    2023-07-14T10:13:26+02:002023-10-12T17:31:14+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-43    Spatio temporal fast gamma electron density data for 25mm (up)Spatio temporal distribution of the gamma electron density in m^3 with energies above 15.8 eV moving upwards.
    Used to calculate the electron densities in Fig 3b and 9c.

    ]]>    2023-07-14T10:19:06+02:002023-10-12T17:31:10+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-44    Spatio temporal fast delta electron density data for 25mm (down)Spatio temporal distribution of the delta electron density in m^3 with energies above 15.8 eV moving downwards.
    Used to calculate the electron densities in Fig 3b and 9e

    ]]>    2023-07-14T10:20:43+02:002023-10-12T17:30:54+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-45    Spatio temporal fast delta electron density data for 25mm (up)Spatio temporal distribution of the delta electron density in m^3 with energies above 15.8 eV moving upwards.
    Used to calculate the electron densities in Fig 3b and 9e.

    ]]>    2023-07-14T10:23:17+02:002023-10-12T17:30:51+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-46    Individual SEs trajectories for 55mmDate used to generate Figure 8
    1. column: time in s
    2. column: position in m

    ]]>    2023-07-14T12:50:44+02:002023-10-12T17:31:05+02:00application/zipzip322765https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-47    Individual SEs trajectories for 25mmDate used to generate Figure 10
    1. column: time in s
    2. column: position in m

    ]]>    2023-07-14T12:52:21+02:002023-10-12T17:31:12+02:00application/zipzip676348https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-48    Single particle trajectories for 25mmDate used to generate Figure 11
    1. column: time in s
    2. column: position in m
    2. column: energy in eV

    ]]>    2023-07-14T12:54:41+02:002023-10-12T17:31:16+02:00application/zipzip12074https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-49    Spatio temporal electric field data for 25mm and SM AElectric field data in V/m
    Used to calculate the electron power densities in Fig 4a

    ]]>    2023-07-14T13:51:23+02:002023-10-12T17:31:45+02:00text/plaintxt14501072https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-50    Spatio temporal electric field data for 55mm and SM AElectric field data in V/m
    Used to calculate the electron power densities in Fig 4c

    ]]>    2023-07-14T13:53:51+02:002023-10-12T17:31:46+02:00text/plaintxt14500609https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-51    Spatio temporal electron flux data for 25mm and SM AElectron flux data in A/m^2.
    Used to calculate the electron power densities in Fig 4a.

    ]]>    2023-07-14T13:58:38+02:002023-10-12T17:31:47+02:00text/plaintxt14376907https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-52    Spatio temporal electron flux data for 55mm and SM AElectron flux data in A/m^2.
    Used to calculate the electron power densities in Fig 4c.

    ]]>    2023-07-14T14:00:32+02:002023-10-12T17:31:48+02:00text/plaintxt14463877https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-53    Spatio temporal fast electron density data for 25mm and SM A (down)Spatio temporal distribution of the electron density in m^3 with energies above 15.8 eV moving downwards.
    Used to calculate the electron densities in Fig 3a.

    ]]>    2023-07-14T14:10:47+02:002023-10-12T17:31:48+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-54    Spatio temporal fast electron density data for 25mm and SM A (up)Spatio temporal distribution of the electron density in m^3 with energies above 15.8 eV moving upwards.
    Used to calculate the electron densities in Fig 3a.

    ]]>    2023-07-14T14:12:57+02:002023-10-12T17:31:49+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-55    Spatio temporal fast electron density data for 55mm and SM A (down)Spatio temporal distribution of the electron density in m^3 with energies above 15.8 eV moving downwards.
    Used to calculate the electron densities in Fig 3c.

    ]]>    2023-07-14T14:14:12+02:002023-10-12T17:31:50+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-56    Spatio temporal fast electron density data for 55mm and SM A (up)Spatio temporal distribution of the electron density in m^3 with energies above 15.8 eV moving upwards.
    Used to calculate the electron densities in Fig 3c.

    ]]>    2023-07-14T14:15:42+02:002023-10-12T17:31:51+02:00text/plaintxt14001000https://rdpcidat.rub.de/dataset/nonlocal-dynamics-secondary-electrons-capacitively-coupled-radio-frequency-discharges-57    DKANhttps://rdpcidat.rub.de