Experimental data are marked as exp

Simulation data are marked as sim

x [sccm] , y[V]

(Figure3a): exp DC-Selfbias for different harmonics and N2-ﬂows (V = Valley-function; P = Peaks-function) Left picture

(Figure3b): sim DC-Selfbias for different harmonics and N2-ﬂows (V = Valley-function; P = Peaks-function) Left Picture

x[N], y[V]

(Figure3c): sim and exp DC-Selfbias for different harmonics and constant N2-ﬂow [1sccm] (V = Valley-function; P = Peaks-function) Right picture ]]>

Experimental data are marked as exp

Simulation data are marked as sim

x [t/TRf] , y[mm]

(Figure4a-4c): exp Exc rate [a. u.]

(Figure4d-4f): sim Exc. Rate [a. u.]

(Figure4d_sheath to Figure4f_sheath): sim sheath edges of the plasma

x [t/TRf] , y[V]

(Figure4g-i): exp Voltage waveform

(Figure4g_to_i_sim): sim corresponding Voltage waveform

x[eV], y[a. u,]

(Figure4j_expansion to Figure4l_expansion): sim EEPF values gained from the blue marked area in Figure4d to Figure4f

(Figure4j_collapse to Figure4l_collapse): sim EEPF values gained from the red marked area in Figure4d to Figure4f

(Figure4j_average to Figure4l_average): sim EEPF values gained from the average of Figure4d to Figure4f

x[mm], y[m-3]

(Figure4m-4o): sim time averaged helium metastable density proﬁle ]]>

Experimental data are marked as exp

Simulation data are marked as sim

x [t/TRf] , y[mm]

(Figure5a-5c): exp Exc rate [a. u.]

(Figure5d-5f): sim Exc. Rate [a. u.]

(Figure5d_sheath to Figure5f_sheath): sim sheath edges of the plasma

x [ev] , y[a.u].

(Figure5g_expansion to Figure5i_expansion): sim EEPF values gained from the blue marked area in Figure5d to Figure5f

(Figure5g_collapse to Figure5i_collapse): sim EEPF values gained from the red marked area in Figure5d to Figure5f

(Figure5g_average to Figure5i_average): sim EEPF values gained from the average of Figure5d to Figure5f

x[mm], y[m-3]

(Figure5j-5l): sim time averaged helium metastable density proﬁle ]]>

Experimental data are marked as exp

Simulation data are marked as sim

x [t/TRf] , y[mm]

(Figure6a-6c): exp Exc rate [a. u.]

(Figure6d-6f): sim Exc. Rate [a. u.]

(Figure6d_sheath to Figure6f_sheath): sim sheath edges of the plasma

x [ev] , y[a.u].

(Figure6g_expansion to Figure6i_expansion): sim EEPF values gained from the blue marked area in Figure6d to Figure6f

(Figure6g_collapse to Figure6i_collapse): sim EEPF values gained from the red marked area in Figure6d to Figure6f

(Figure6g_average to Figure6i_average): sim EEPF values gained from the average of Figure6d to Figure6f

x[mm], y[m-3]

(Figure6j-6l): sim time averaged helium metastable density proﬁle ]]>

Experimental data are marked as exp

Simulation data are marked as sim

x [mm] , y[m^{-3}s^{-1}]

(Figure7_N1): sim Total diss. Rate for N = 1 and 1sccm N_2 admixture

(Figure7_N2): sim Total diss. Rate for N = 2 and 1sccm, 2sccm, 4sccm N_2 admixture

(Figure7_N4): sim Total diss. Rate for N = 4 and 1sccm, 4sccm, 10sccm N_2 admixture ]]>

Experimental data are marked as exp

Simulation data are marked as sim

x [mm] , y[m^{-3}s^{-1}]

(Figure8_Diss): sim electron impact diss. Rate of N2 for N = 1, 2 and 4 and 1-10 sccm N_2 admixture

(Figure8_He): sim He* density for N = 1,2 and 4 and 1-10 sccm N_2 admixture ]]>