Experimental data are marked as exp

Calculated data are marked as calc

Figure 4 a) exp

x (mm),y (exp atomic oxygen densities (cm-3)),

Harmonics used: 1(red), 2(olive green), 3(white) and 4(blue)

Figure 4 a) calc

x (mm),y (calc atomic oxygen densities (cm-3)),

Harmonics used: 1(red_dashed), 2(olive green_dashed), 3(white_dashed) and 4(blue_dashed)

Figure 4 b)

x (N),y (exp atomic oxygen densities (cm-3)),

Figure 4 c)

x (N),y (Normalized k) ]]>

Experimental data are marked as exp

Calculated data are marked as calc

x [t/TRf] , y[mm]

(Figure5a-5c): Exp Exc. Rate for O2-admixtures of 0.5% and N=1, N=2 and N=4 respectively ]]>

Experimental data are marked as exp

Calculated data are marked as calc

(Figure6a-6c):

x [mm] , y[cm^-3], z[mm]

Calc spatial distribution of the atomic oxygen density for N=1, N=2 and N=4 respectively

(Figure6d-6f):

x [mm] , y[m^-3 s^-1]

Calc spatially resolved atomic oxygen production rate for N=1, N=2 and N=4 respectively ]]>

Experimental data are marked as exp

Calculated data are marked as calc

(Figure7a-7c): Exp absolute densities of atomic oxygen for O2 admixtures varied from 0.05 % to 1.0% with N=1, N=2 and N=4 respectively

x [mm] , y[cm^-3]

(Figure7d-7f): Exp peak and mean (spaceaveraged) values of the atomic oxygen for N=1, N=2 and N=4 respectively

x [O2 add] , y[cm^-3]

Experimental data are marked as exp

Calculated data are marked as calc

x [t/TRf] , y[mm]

(Figure8a8c): Exp Exc. Rate for O2-admixtures of 0.05%, 0.2% and 0.5% respectively with N=1

(Figure8d-8f): Exp Exc. Rate for O2-admixtures of 0.05%, 0.2% and 0.5% respectively with N=4 ]]>

Experimental data are marked as exp

Calculated data are marked as calc

x [mm] , y [cm^-3]

(Figure9a-9b): Exp absolute density proﬁles of He-I 1s2s 3S1 metastables for O2-admixtures of 0.05% and N=1 and N=4 respectively

(Figure9c): Exp absolute density proﬁles of He-I 1s2s 3S1 metastables for O2-admixtures of 0.2% for N=4 ]]>

Experimental data are marked as exp

Calculated data are marked as calc

Harmonics used: 1-4

x (N),y (exp mean atomic oxygen densities (cm-3)),

Oxygen admixtures used: 0.05 %(red), 0.1 %(blue), 0.2 %(cyan), 0.4 %(olive green), 0.6 %(dark blue), 0.8 %(green), 1.0 %(orange)

]]>Experimental data are marked as exp

Calculated data are marked as calc

Figure 11 a)

Harmonics used: 1(red), 2(olive green) and 4(blue)

Voltage is varied between 325 Vpp – 550 Vpp

x (Vpp),y (exp peak atomic oxygen densities (cm-3)),

Figure 11 b)

Harmonics used: 1(red), 2(olive green) and 4(blue)

Voltage is varied between 325 Vpp – 550 Vpp

x (Vpp),y (exp mean atomic oxygen densities (cm-3)),

Experimental data are marked as exp

Calculated data are marked as calc

Figure 12 350V: (red) exp

Figure 12 450V: (white) exp

Figure 12 500V: (olive green) exp

Figure 12 550V: (blue) exp

x (mm),y (exp atomic oxygen densities (cm-3)) ]]>

Experimental data are marked as exp

Calculated data are marked as calc

x [t/TRf], y[mm]

(Figure13a-13c): Exp Exc. Rate for O2-admixtures of 0.5% and N=4 with a peak-to-peak voltage of 350V, 450V and 550V respectively ]]>