{"help":"Return the metadata of a dataset (package) and its resources. :param id: the id or name of the dataset :type id: string","success":true,"result":[{"id":"b6b9247f-c880-4843-b4a9-643eafa381c1","name":"fast-charge-exchange-ions-high-power-impulse-magnetron-sputtering-titanium-probes-electrical","title":"Fast charge exchange ions in high power impulse magnetron sputtering of titanium as probes for the electrical potential","author_email":"wolfgang.breilmann-a5s@rub.de","maintainer":"Research Data Repository","maintainer_email":"achim.vonkeudell@rub.de","license_title":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/","notes":"\u003Cp\u003EHigh power impulse magnetron sputtering (HiPIMS) plasmas exhibit a high ionization fraction of the sputtered material and ions with high kinetic energies, which produce thin \ufb01lms with superior quality. These ion energy distribution functions (IEDF) contain energetic peaks, which are believed to be linked to a distinct electrical potential hump (ionization zone) inside rotating localized ionization zones, so called spokes, at target power densities above 1kW\/cm^\u22122. Any direct measurement of this electrical potential structure is, however, very dif\ufb01cult due to the dynamic nature of the spokes and the very high local power density, which hampers the use of conventional emissive probes. Instead, we use a careful analysis of the IEDFs for singly and doubly charged titanium ions from a HiPIMS plasma at varying target power density. The energy peaks in the IEDFs measured at the substrate depend on the point of ionization and any charge exchange collisions on the path between ionization and impact at the substrate. Thereby, the IEDFs contain a convoluted information about the electrical potential structure inside the plasma. The analysis of these IEDFs reveal that higher ionization states originate at high target power densities from the central part of the plasma spoke, whereas singly charged ions originate from the perimeter of the plasma spoke. Consequently, we observe different absolute ion energies with the energy of Ti2+ being slightly higher than two times the energy of Ti+. Additional peaks are observed in the IEDFs of Ti+ originating from charge exchange reactions from Ti2+ and Ti3+ with titanium neutrals. Based on this analysis of the IEDFs, the structure of the electrical potential inside a spoke is inferred yielding Delta Phi_(ionization zone)= 25 V above the plasma potential, irrespective of target power density.\u003C\/p\u003E\n","url":"https:\/\/rdpcidat.rub.de\/dataset\/fast-charge-exchange-ions-high-power-impulse-magnetron-sputtering-titanium-probes-electrical","state":"Active","log_message":"Update to resource Time resolved IEDFs and time averaged IEDFs","private":true,"revision_timestamp":"Mon, 02\/14\/2022 - 17:08","metadata_created":"Fri, 01\/10\/2020 - 12:20","metadata_modified":"Mon, 02\/14\/2022 - 17:08","creator_user_id":"42e90bc1-1ed0-429b-8269-0cd2eec53cb4","type":"Dataset","resources":[{"id":"5d92dca7-11ff-4ddf-8eba-5ab85615d3c2","revision_id":"","url":"https:\/\/rdpcidat.rub.de\/sites\/default\/files\/iedf.zip","description":"\u003Cp\u003ETime and energy resolved IEDFs as well as time averaged energy resolved IEDFs\u003C\/p\u003E\n","format":"zip","state":"Active","revision_timestamp":"Mon, 02\/14\/2022 - 17:08","name":"Time resolved IEDFs and time averaged IEDFs","mimetype":"application\/zip","size":"1.48 MB","created":"Fri, 01\/10\/2020 - 12:22","resource_group_id":"ec8154f9-454d-4b85-895c-f5e010310847","last_modified":"Date changed  Mon, 02\/14\/2022 - 17:08"},{"id":"8807dbbd-c4cc-4f9e-adc9-490e1021613a","revision_id":"","url":"https:\/\/rdpcidat.rub.de\/sites\/default\/files\/ui.zip","description":"\u003Cp\u003ECurrent and voltage curves\u003C\/p\u003E\n","format":"zip","state":"Active","revision_timestamp":"Sun, 03\/21\/2021 - 15:07","name":"Current and voltage curves","mimetype":"application\/zip","size":"146.29 KB","created":"Fri, 01\/10\/2020 - 12:54","resource_group_id":"ec8154f9-454d-4b85-895c-f5e010310847","last_modified":"Date changed  Sun, 03\/21\/2021 - 15:07"}],"tags":[{"id":"50820183-cedf-4e0f-9583-d328abf18ebd","vocabulary_id":"2","name":"HiPIMS"},{"id":"c552fb50-869c-48ed-92b6-c33657520854","vocabulary_id":"2","name":"Spokes"},{"id":"baa8c09a-c033-4ae8-b9c6-a3b8ac548fd1","vocabulary_id":"2","name":"ion mass spectrometry"}],"groups":[{"description":"\u003Cp\u003EThe group \u0022Experimental Physics II - Reactive Plasmas\u0022 at the faculty of physics and astronomy at Ruhr University Bochum.\u003C\/p\u003E\n","id":"ec8154f9-454d-4b85-895c-f5e010310847","image_display_url":"https:\/\/rdpcidat.rub.de\/sites\/default\/files\/rublogoweiss_0.png","title":"EP2","name":"group\/ep2"}]}]}