{"help":"Return the metadata of a dataset (package) and its resources. :param id: the id or name of the dataset :type id: string","success":true,"result":[{"id":"90a697c4-6332-40d0-aedb-ec5e9cc9cf01","name":"efficient-pe-ald-process-tio2-thin-films-employing-new-ti-precursor","title":"An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor","author_email":"anjana.devi@rub.de","maintainer":"Research Data Repository","maintainer_email":"achim.vonkeudell@rub.de","license_title":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/","notes":"\u003Cp\u003EAn efficient plasma-enhanced atomic layer deposition (PE-ALD) process was developed for TiO2 thin films of high quality, using a new Ti-precursor, namely tris(dimethylamido)-(dimethylamino-2-propanolato)titanium(IV) (TDMADT). The five-coordinated titanium complex is volatile, thermally stable and reactive, making it a potential precursor for ALD and PE-ALD processes. Process optimization was performed with respect to plasma pulse length and reactive gas flow rate. Besides an ALD window, the application of the new compound was investigated using in situ quartz-crystal microbalance (QCM) to monitor surface saturation and growth per cycle (GPC). The new PE-ALD process is demonstrated to be an efficient procedure to deposit stoichiometric titanium dioxide thin films under optimized process conditions with deposition temperatures as low as 60 \u00b0C. Thin films deposited on Si(100) and polyethylene-terephthalate (PET) exhibit a low RMS roughness of about 0.22 nm. In addition, proof-of-principle studies on TiO2 thin films deposited on PET show promising results in terms of barrier performance with oxygen transmission rates (OTR) found to be as low as 0.12 cm3 \u00d7 cm\u22122 \u00d7 day\u22121 for 14 nm thin films.\u003C\/p\u003E\n","url":"https:\/\/rdpcidat.rub.de\/dataset\/efficient-pe-ald-process-tio2-thin-films-employing-new-ti-precursor","state":"Active","log_message":"Update to resource An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor","private":true,"revision_timestamp":"Thu, 04\/25\/2024 - 16:09","metadata_created":"Fri, 04\/24\/2020 - 11:23","metadata_modified":"Thu, 04\/25\/2024 - 16:09","creator_user_id":"a3d3820b-5155-4810-ab1b-227b1eed2c58","type":"Dataset","resources":[{"id":"1d026c1e-7831-4339-81c0-16f40b5ef24a","revision_id":"","url":"https:\/\/doi.org\/10.1039\/C5TC03385C","description":"","format":"html","state":"Active","revision_timestamp":"Thu, 04\/25\/2024 - 16:09","name":"An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor","mimetype":"html","size":"","created":"Fri, 04\/24\/2020 - 11:25","resource_group_id":"efd12b80-2fad-4ff2-8d78-c87e08b01ea8","last_modified":"Date changed  Thu, 04\/25\/2024 - 16:09"}],"tags":[{"id":"b04586ca-dbd7-49ff-8f5d-1f6a228b654a","vocabulary_id":"2","name":"PEALD"},{"id":"2ac87437-4966-455b-bd18-6c677d1baa03","vocabulary_id":"2","name":"Thin film"},{"id":"bd51eb40-f637-445c-93a0-c908840e709b","vocabulary_id":"2","name":"TiO2"},{"id":"b8b2ce26-98a1-4f58-83ad-4b953cbadfdc","vocabulary_id":"2","name":"Precursor chemistry"}],"groups":[{"description":"\u003Cp\u003EOur group focuses on the development, synthesis and evaluation of high-performance precursors for vapor phase deposition processes namely chemical vapor deposition (CVD), atomic layer deposition (ALD) and molecular layer deposition (MLD).\u003C\/p\u003E\n","id":"efd12b80-2fad-4ff2-8d78-c87e08b01ea8","image_display_url":"https:\/\/rdpcidat.rub.de\/sites\/default\/files\/logo_0.png","title":"Inorganic Materials Chemistry","name":"group\/inorganic-materials-chemistry"}]}]}