{"help":"Return the metadata of a dataset (package) and its resources. :param id: the id or name of the dataset :type id: string","success":true,"result":[{"id":"0c57651c-39f9-4a1a-8ed1-1bae1ba4f287","name":"embedded-argon-tool-sampling-local-structure-thin-plasma-deposited-aluminum-oxide-films","title":"Embedded argon as a tool for sampling local structure in thin plasma deposited aluminum oxide films","author_email":"marina.prenzel@rub.de","maintainer":"Research Data Repository","maintainer_email":"achim.vonkeudell@rub.de","license_title":"https:\/\/creativecommons.org\/licenses\/by\/4.0\/","notes":"\u003Cp\u003EAl2O3 thin films, either amorphous or of varying degrees of crystallinity, were deposited by two-frequency radio-frequency magnetron sputtering. Film crystallinity was investigated by Fourier Transform Infrared Spectroscopy (FTIR), and X-ray diffraction (XRD). X-ray photoelectron spectroscopy (XPS) was employed to determine the amount of Ar naturally trapped within the films during the deposition process. A clear correlation was found between the existence of crystalline phases, as determined by XRD, and a shift towards lower binding energy positions of the Ar2p core levels of embedded gas. The shift is due to differences in the local Al2O3 matrix (amorphous or crystalline) of the embedded gas, thus providing an XPS fingerprint that can be used to qualitatively determine the presence or absence of crystalline phases in very thin films.\u003C\/p\u003E\n","url":"https:\/\/rdpcidat.rub.de\/dataset\/embedded-argon-tool-sampling-local-structure-thin-plasma-deposited-aluminum-oxide-films","state":"Active","log_message":"Update to resource Figure 3: XPS analysis","private":true,"revision_timestamp":"Sun, 09\/12\/2021 - 16:36","metadata_created":"Wed, 11\/07\/2012 - 08:41","metadata_modified":"Sun, 09\/12\/2021 - 16:36","creator_user_id":"79009e3e-aee0-421f-9d06-2cafa8868bbd","type":"Dataset","resources":[{"id":"289b9221-3cb2-4e1d-b263-13061109fb92","revision_id":"","url":"https:\/\/rdpcidat.rub.de\/sites\/default\/files\/XRD_30_34_38_0.csv","description":"\u003Cp\u003EXRD was realized under grazing incidence using a Bruker D8 General Area Detection Diffraction System (GADDS) with Cu Ka radiation at an incident angle of 15. The analyzed 2h range was 20\u201370. The applied X-ray anode voltage and current settings were 40 kV and 40 mA, respectively.\u003C\/p\u003E\n\u003Cp\u003EThree samples were shown (a) sample 30, (b) sample 34 and (c) sample 38.\u003C\/p\u003E\n","format":"csv","state":"Active","revision_timestamp":"Sun, 09\/12\/2021 - 16:35","name":"Figure 1: grazing incidence XRD","mimetype":"text\/csv","size":"28.8 KB","created":"Wed, 11\/07\/2012 - 09:11","resource_group_id":"ec8154f9-454d-4b85-895c-f5e010310847","last_modified":"Date changed  Sun, 09\/12\/2021 - 16:35"},{"id":"01f49c36-50f1-4c49-b797-e31c45eba081","revision_id":"","url":"https:\/\/rdpcidat.rub.de\/sites\/default\/files\/FTIR_30_34_38.csv","description":"\u003Cp\u003EFTIR transmission measurements of the s-polarized component were performed at 60 angle of incidence using a Bruker IFS 66\/S spectrometer in the range 400\u20136000 cm^(-1).\u003C\/p\u003E\n\u003Cp\u003EWithin figure 2, (a) represents sample 30, (b) sample 34 and (c) sample 38.\u003C\/p\u003E\n","format":"csv","state":"Active","revision_timestamp":"Sun, 09\/12\/2021 - 16:36","name":"Figure 2: FTIR transmission function","mimetype":"text\/csv","size":"240.8 KB","created":"Wed, 11\/07\/2012 - 09:41","resource_group_id":"ec8154f9-454d-4b85-895c-f5e010310847","last_modified":"Date changed  Sun, 09\/12\/2021 - 16:36"},{"id":"8f7926ae-840a-435a-8d40-bc02fd162df9","revision_id":"","url":"https:\/\/rdpcidat.rub.de\/sites\/default\/files\/XPS_30_34_38.zip","description":"\u003Cp\u003EThe measurements were performed with a Versaprobe spectrometer from Physical Electronics, using monochromatized AlK alpha radiation at 1486.6 eV and a pass energy of 23.5 eV. This results in a full width at half maximum (FWHM) of 0.58 eV for the Ag3d5\/2 core level of a clean Ag sample. No in-situ cleaning was performed prior to the XPS measurement. Charge neutralization was done by a simultaneous irradiation with electrons and low energy (20 eV) ion beams. The measurement spot had a diameter of 200 \u00b5m. The take-off angle was 45\u00b0. After a first measurement, in-situ bombardment with Ne ions with 4 keV was additionally performed in the XPS chamber, in order to induce structural changes in the films. Mathematical analysis of the Ar2p core level peaks was performed with the UNIFIT software, using a convolution of Lorentzian and Gaussian line profiles. The doublet separation between the Ar2p3\/2 and Ar2p1\/2 was fixed to 2.1 eV. The width of the Lorentzian component, which is associated to the lifetime of the photohole, was fixed to a value of 0.12 eV. The Gaussian widths of both doublet components (2p3\/2 and 2p1\/2) were the same. The BE scale was fixed by placing the C1s peak of adventitious carbon at 284.7 eV. This resulted in a BE mean value of 74.0 plus\/minus 0.3 eV for the position of the Al2p3\/2 core level in all the magnetron-deposited Al2O3 films.\u003C\/p\u003E\n\u003Cp\u003EFigure 3 (a) shows sample 30 (a.i. as introduced and after sputtering), (b) sample 34 (a.i. as introduced and after sputtering) and (c) sample 38 (a.i. as introduced and after sputtering)\u003C\/p\u003E\n","format":"csv","state":"Active","revision_timestamp":"Sun, 09\/12\/2021 - 16:36","name":"Figure 3: XPS analysis","mimetype":"application\/zip","size":"38.77 KB","created":"Wed, 11\/07\/2012 - 09:41","resource_group_id":"ec8154f9-454d-4b85-895c-f5e010310847","last_modified":"Date changed  Sun, 09\/12\/2021 - 16:36"}],"tags":[{"id":"3e81c30b-99e8-4a84-8edd-1f01dad7ab7b","vocabulary_id":"2","name":"Al2O3"},{"id":"f324ca40-0b99-424f-9f81-814fc6c1b0e4","vocabulary_id":"2","name":"magnetron sputtering"},{"id":"89961185-7518-4955-80f8-e2e4204502de","vocabulary_id":"2","name":"XPS"},{"id":"ff62e6c0-a268-45b2-9454-345f5f511cb3","vocabulary_id":"2","name":"MFCCP"},{"id":"4dae11a7-e4a5-450d-be9c-ad0360f53da9","vocabulary_id":"2","name":"low pressure plasma"}],"groups":[{"description":"\u003Cp\u003EThe group \u0022Experimental Physics II - Reactive Plasmas\u0022 at the faculty of physics and astronomy at Ruhr University Bochum.\u003C\/p\u003E\n","id":"ec8154f9-454d-4b85-895c-f5e010310847","image_display_url":"https:\/\/rdpcidat.rub.de\/sites\/default\/files\/rublogoweiss_0.png","title":"EP2","name":"group\/ep2"}]}]}